In recent years, the demands for load capacity and fatigue life of gears constantly increased while weight and volume had to be reduced. To achieve those aims, most of today's gear wheels are heat treated so tooth surfaces will have high wear resistance. As a consequence of heat treatment, distortion unavoidably occurs. With the high geometrical accuracy and quality required for gears, a hard machining process is needed that generates favorable properties on the tooth surfaces and the near-surface material with high reliability.